The MFS02 micro flow sensor utilizes thin film technology to layer platinum micro heaters and temperature sensors on an ultrasensitive polymer membrane. The sensor is capable of measuring the thermal ...

Measurement of micro-fluidic flow for biochemical and medical purposes is demonstrated with a micro-electromechanical system and two pressure sensor compensating integrated circuits (ICs). The flow ...

KIMM develops technology for a sensor to measure low flow rate and bubbles during drug infusion. Mass production of the world's first safe electric drug infusion pump equipped with a flow sensor is in ...