Abstract: In this paper, a contamination-insensitive differential capacitive pressure sensor with a sealed gap is presented. This device is made of three polysilicon layers including a stationary ...

Abstract: The investigation of the pressure sensor chip's design developed for operation in ultralow differential pressure ranges has been conducted. The optimum geometry of a diaphragm has been ...

This is the official explanation for the collapse of a high-rise apartment building in a nearly-completed residential complex in Shanghai. The building toppled over almost completely intact, leaving ...